刘战合,姬金祖,王晓璐,王菁.飞机座舱玻璃铌掺杂ITO镀膜工艺参数选择[J].航空工程进展,2017,8(1):78-83
飞机座舱玻璃铌掺杂ITO镀膜工艺参数选择
Parameter selection of Nb-Doped ITO coating process for aircraft cockpit glass
投稿时间:2016-11-07  修订日期:2016-12-19
DOI:10.16615/j.cnki.1674-8190.2017.01.012
中文关键词:  溅射  铌掺杂ITO  座舱  飞行器  隐身
英文关键词:sputtering  Nb-Doped Indium Tin Oxides(ITO)  cockpit  aircraft  stealth
基金项目:国家重点基础研究计划(973计划)(61320);河南省高等学校重点科研项目计划(17B590002)
作者单位E-mail
刘战合 郑州航空工业管理学院航空工程学院 nwpulzh@163.com 
姬金祖 北京航空航天大学航空科学与工程学院  
王晓璐 郑州航空工业管理学院航空工程学院  
王菁 郑州航空工业管理学院航空工程学院  
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中文摘要:
      为提高飞行器座舱玻璃的隐身性能并优化座舱光电性能参数,针对座舱玻璃铌掺杂ITO (Indium Tin Oxides)镀膜,重点研究了参与溅射的靶材数目、氧气流量等工艺参数对铌掺杂ITO镀膜性能参数的影响规律。实验结果表明,参与溅射的靶材数目增加,方块电阻快速降低,之后下降斜率变小,趋于定值,透光率振荡变化而当方块电阻大小稳定后逐渐变小;氧气流量增加,方块电阻先减小后增加,流量大于6sccm时,方块电阻迅速增加,透光率振荡后降低;不同基底的铌掺杂ITO膜方块电阻和透光率变化不大,仅影响真空度等其他工艺过程;各工艺参数对薄膜颜色有一定制约作用。
英文摘要:
      In order to improve the stealth performance of the cockpit glass and optimize the the cockpit’s photoelectric performance parameters, for the Nb-Doped ITO (Indium Tin Oxides) coating of the aircraft cockpit glasses, this paper mainly studied the Nb-Doped ITO coating performance parameters’ influence rule of the technological parameters such as the number of sputtering targets and oxygen flow. The experiment results show that, with the number of targets involved in sputtering increases, the sheet resistance first decreases rapidly, then the falling slope becomes small, and at last tends to constant value; the transmittance changes oscillatorily, and when the sheet resistance is stable, the transmittance gradually becomes smaller; as the oxygen flow increases, the sheet resistance decreases at first, and then increases, when the flow is greater than 6 sccm, the sheet resistance increases rapidly, and the transmittance decreases after oscillation. The sheet resistance and transmittance of the Nb-Doped ITO films with different substrates don’t change great, and the different substrates just affect the degree of vacuum and other process. The technological parameters also have certain effects on the film color.
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